EP-CM22BF Water-Lubricated Oil-Free Screw Air Compressor
The EP-CM22BF is a 22 kW fixed-frequency water-lubricated oil-free screw compressor delivering up to 3.50 m³/min at 0.8–1.25 MPa — targeting the upper mid-range where semiconductor equipment rooms, beverage production lines, and precision manufacturing cells require higher flow rates of the strictest-grade Class 0 oil-free compressed air.
EP-CM22BF | 22 kW Upper Mid-Range Water-Lubricated Oil-Free Compressor — 3.50 m³/min
As production lines grow and manufacturing cells expand, the compressed air demand that once sat comfortably within a 15–18 kW compressor's output reaches the ceiling of that machine's capacity. Adding a second unit creates the control coordination challenges and maintenance overhead of a two-machine installation. Stepping to a larger fixed-frequency machine in the next power class resolves both problems — providing additional output headroom and maintaining the operational simplicity of a single compressor system.
The EP-CM22BF occupies this exact position in the CMB series. At 22 kW (30 HP) with a peak free air delivery of 3.50 m³/min (124 cfm) at 0.8 MPa, it delivers the output increment that growing production lines need while remaining within the installation envelope of the 18.5 kW model. The 65 dB(A) noise level is unchanged from the EP-CM18BF, and ISO 8573-1 Class 0 oil-free air quality is maintained structurally through water lubrication across the full 0.8–1.25 MPa working pressure range. For semiconductor equipment rooms, beverage filling lines, and precision manufacturing cells approaching the capacity ceiling of smaller models, the EP-CM22BF provides the right increment of growth capacity. Explore the complete CMB series for all output configurations.
Technical Specifications
| Parameter | 0.8 MPa | 1.0 MPa | 1.25 MPa |
|---|---|---|---|
| Motor Power | 22 kW / 30 HP | 22 kW / 30 HP | 22 kW / 30 HP |
| FAD (m³/min) | 1.40–3.50 | 1.25–3.13 | 1.04–2.61 |
| FAD (cfm) | 49–124 | 44–111 | 37–92 |
| Noise Level | 65 dB(A) | 65 dB(A) | 65 dB(A) |
| Weight (Water-cooled) | 1000 kg | 1000 kg | 1000 kg |
| Weight (Air-cooled) | 850 kg | 850 kg | 850 kg |
| Dimensions W-cooled (mm) | 1900×1000×1635 | 1900×1000×1635 | 1900×1000×1635 |
| Dimensions A-cooled (mm) | 1680×1000×1335 | 1680×1000×1335 | 1680×1000×1335 |
| Air Quality | ISO 8573-1 Class 0 | ISO 8573-1 Class 0 | ISO 8573-1 Class 0 |
| Lubrication | Pure water — zero oil | Pure water — zero oil | Pure water — zero oil |
Semiconductor Applications: Where Contamination Tolerance is Zero
In semiconductor fabrication, the concept of an acceptable contamination level does not apply in the way it does in most industrial manufacturing. A single oil molecule on a photoresist surface can destroy the resolution of a lithographic pattern. Oil vapour in a CVD process chamber contaminates the deposition environment. Oil on a wafer handling robot creates particles that distribute across every wafer the robot contacts. The financial consequence of tracing a yield loss event to compressed air contamination — in wafer scrap, process chamber cleaning downtime, and investigation labour — is severe enough that semiconductor facilities specify the highest achievable air purity as a baseline, not as a premium option.
The EP-CM22BF's structural Class 0 oil-free guarantee — inherent in the water lubrication mechanism that has never contained oil — satisfies this zero-contamination requirement without reliance on filtration components that degrade over time. The all-stainless-steel internal pathway ensures that no metallic particles from corrosion enter the compressed air supply, meeting the particulate requirements of semiconductor process environments alongside the oil-content requirements.
Key Features
3.50 m³/min — Growing Production Coverage
The 13% output step from 18.5 kW to 22 kW (3.10 to 3.50 m³/min) provides the capacity headroom that production lines approaching the smaller model's ceiling require. One machine covers eight to twelve simultaneous light pneumatic users, a full medium beverage filling line, or a semiconductor equipment room with multiple process tools running concurrently.
All-Stainless-Steel Air Path
From the 1 μm air intake filter through the single-screw compression chamber, water separation barrel, internal piping, and 1-inch discharge connection, every surface in contact with compressed air is stainless steel. Rust particles, iron scale, and metallic contamination are structurally eliminated — meeting the zero-particulate requirements of semiconductor cleanrooms and pharmaceutical sterile manufacturing areas.
Water-Air Separation at 10 m/s
The stainless steel water-and-air separation barrel uses an internal streamline design that accelerates the air-water mixture to 10 m/s, achieving complete moisture separation by centrifugal and velocity effects. Separated water settles to the barrel bottom and is discharged through the minimum pressure valve; the dry compressed air exits to the downstream treatment system.
65 dB(A) Across Full 22 kW Output
Maintaining 65 dB(A) at 22 kW output reflects the noise control engineering of the single-screw design: no belt drive vibration, no gear mesh frequency, no valve clatter, and the smooth orbital compression cycle of the single screw and star wheel arrangement. Direct-drive permanent magnet motor coupling eliminates all belt and coupling transmission noise sources.
IoT-Ready Control Interface
The Schneider Electric PLC control system is compatible with external SCADA and DCS integration via the 485 communication interface, enabling the EP-CM22BF to be included in facility-level energy management and compressed air monitoring systems without additional hardware. Real-time data output covers pressure, temperature, run hours, and fault status.
Aviation-Grade Star Wheel Materials
Star wheel blades — the compression elements that mesh with the main screw — are manufactured from confidential aviation-grade composite materials that solve the wear challenge at the screw-star wheel interface inherent in conventional designs. Tested to multi-year service intervals, the star wheel material selection is the enabling component for the 25-year air end design life at full rated pressure and flow.
Customer Case Studies
Taiwan — Semiconductor Equipment Room
Industry: Semiconductor Manufacturing | Application: Process air for wafer handling robots, lithography alignment systems, and CVD process chambers
"Our fab quality specification requires Class 0 oil-free air with particulate counts below ISO Class 1 at all process equipment connection points. The EP-CM22BF meets both requirements structurally. We installed it adjacent to the clean service corridor and the 65 dB(A) noise level is compatible with the cleanroom anteroom acoustic standards. After 20 months of operation, no yield loss event has been attributed to compressed air quality."
★★★★★
Argentina — Craft Beverage Co-Packer
Industry: Beverage Manufacturing | Application: Food-grade compressed air for multi-product filling, carbonation assist, and packaging pneumatics
"We co-pack for twelve craft beverage brands across beer, cider, and non-alcoholic categories. Every client requires documented Class 0 oil-free process air. The EP-CM22BF's TUV certification satisfies all twelve client requirements from a single document. The 3.50 m³/min output covers our three filling lines simultaneously at full production speed. Annual maintenance consists of one filter change and one bearing grease — a fraction of the labour our previous system required."
★★★★★
Sweden — Medical Device Assembly Facility
Industry: Medical Devices | Application: ISO 13485-compliant process air for surgical instrument assembly and sterilisation preparation
"Our ISO 13485 quality management system requires compressed air quality documentation at every process air point. The EP-CM22BF's structural Class 0 certification simplifies this documentation requirement significantly — we reference the TUV certificate and the structural oil-free design rather than maintaining a filter inspection schedule and sampling programme. Our regulatory affairs team found the documentation pathway considerably cleaner than our previous filtration-dependent approach."
★★★★★
Frequently Asked Questions
Higher Output, Same Structural Oil-Free Guarantee
Semiconductor fabs, beverage co-packers, medical device assemblers, and precision manufacturers in Taiwan, Argentina, Sweden, and 50+ markets choose the EP-CM22BF for the output growth they need without compromising the air quality standard their processes demand. Contact us with your application details for a confirmed specification and quotation.
Factory tour
Related Products
-
CM/PV permanent magnet variable frequency oil-free screw air compressor
-
CM/PV permanent magnet variable frequency oil-free screw air compressor
-
CM/GPV medium pressure permanent magnet variable frequency oil-free screw air compressor
-
CM/G medium pressure industrial frequency oil-free screw air compressor